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Silicon-on-insulator interferometric strain sensor
Conference

Silicon-on-insulator interferometric strain sensor

Authors

Pearson GN; Jessop PE

Volume

4997

Pagination

pp. 242-249

Publisher

SPIE, the international society for optics and photonics

Publication Date

June 2, 2003

DOI

10.1117/12.476663

Name of conference

Photonics Packaging and Integration III

Conference proceedings

Proceedings of SPIE--the International Society for Optical Engineering

ISSN

0277-786X