Silicon-based surface gratings for efficient fiber-chip and free-space beam coupling

Silicon photonics has established itself as a key integration platform, leveraging high-quality materials and large-scale manufacturing using mastered toolsets of complementary metal-oxide-semiconductor (CMOS) foundries. Chip-scale photonics offer unique promises for dense integration of versatile optical functions through compact and high-performance building blocks. Integrated photonics is now competing technology for many applications, …