Substitutional doping during low-dose implantation of Bi and Ti ions in Si at 25°C
Journal Articles
- Overview
- Research
- Identity
- Additional Document Info
- View All
Overview
status
publication date
- January 1969
has subject area
- 0202 Atomic, Molecular, Nuclear, Particle and Plasma Physics (FoR)
- 0204 Condensed Matter Physics (FoR)
- 0299 Other Physical Sciences (FoR)
- Applied Physics (Science Metrix)