Incorporation of nitrogen in sputtered carbon films Journal Articles

authors

• Axén, N
• Botton, Gianluigi
• Lou, HQ
• Somekh, RE
• Hutchings, IM

status

• published 

publication date

• June 1996

has subject area

• 0204 Condensed Matter Physics (FoR)
• 0306 Physical Chemistry (incl. Structural) (FoR)
• 0912 Materials Engineering (FoR)
• Applied Physics (Science Metrix)

published in

• Surface and Coatings Technology  Journal

keywords

• Materials Science
• Materials Science, Coatings & Films
• NITRIDE
• Physical Sciences
• Physics
• Physics, Applied
• Science & Technology
• Technology
• carbon nitride
• sputter deposition
• thin films

Digital Object Identifier (DOI)

• 10.1016/0257-8972(95)02534-0

start page

• 262

end page

• 268

volume

• 81

issue

• 2-3