Ultrahigh vacuum apparatus for combined low-energy electron diffraction, Auger spectroscopy, MeV ion scattering, and nuclear microanalysis

A bakable target manipulator/2-axis goniometer has been developed which permits high-precision MeV channeling studies and nuclear microanalyses to be performed over a wide temperature range (150–1000 K) under ultrahigh vacuum conditions (7×10−9 Pa). Design and performance features of the goniometer and target chamber and of the two-stage differentially pumped beam-line connection to a 2.5-MV Van de Graaff accelerator are discussed. A transmission Faraday cup in conjunction with a set of optically positioned standard targets enables the various ion beam analyses to be performed with an absolute accuracy of 1%–2%.

Ultrahigh vacuum apparatus for combined low-energy electron diffraction, Auger spectroscopy, MeV ion scattering, and nuclear microanalysis Journal Articles