Conference
Defect enhanced silicon-on-insulator microdisk photodetector
Abstract
We demonstrate a CMOS compatible silicon-on-insulator microdisk resonator photodiode with an enhanced response owing to the introduction of defects via ion implantation.
Authors
Ackert J; Knights A; Fiorentino M; Beausoleil R; Jessop P
Pagination
pp. 76-77
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Publication Date
May 1, 2012
DOI
10.1109/oic.2012.6224439
Name of conference
2012 Optical Interconnects Conference