Conference
Study of thermal desorption of UV/ozone oxide on InP
Abstract
Commercially available (001) InP substrates have been treated by exposure to UV/ozone to produce surface oxide layers suitable for thermal desorption prior to epitaxial growth. Thermally induced changes in composition and structure of the oxidized surfaces in vacuum have been studied using Auger electron spectroscopy (AES), reflection high-energy electron diffraction (RHEED), and Rutherford backscattering/channeling (RBSC). It is found that for …
Authors
Comedi D; Balcaitis G; Robinson BJ; Thompson DA
Volume
70
Pagination
pp. 1043-1049
Publisher
Canadian Science Publishing
Publication Date
October 1, 1992
DOI
10.1139/p92-168
Conference proceedings
Canadian Journal of Physics
Issue
10-11
ISSN
0008-4204