Conference
The Structure and Mechanical Properties of Ru-Cu and Ru-Ti Nanolayer Composites
Abstract
Multilayers of Ru-Cu and Ru-Ti have been prepared by electron beam evaporation technique. One set of composites has Ru thickness varying from 250 to 2500Å alternating with Cu or Ti of 15Å. The other set has 250Å of Ru and the Cu or Ti layer varies between 15 and 200Å. Nanoindentation measurements show that there is no significant change in hardness as either Ru or Cu/Ti thickness varies. However, the Ru-Cu multilayer has twice the hardness of …
Authors
Kung H; Nastasi M; Jervis TR; Hubbard KM; Messner RM; Mitchell TE; Embury JD
Volume
308
Pagination
pp. 747-752
Publisher
Springer Nature
Publication Date
1993
DOI
10.1557/proc-308-747
Conference proceedings
MRS Advances
Issue
1
ISSN
2731-5894