Conference
Integrated Mach-Zehnder Interferometer on SU-8 Polymer for Designing Pressure Sensors
Abstract
This paper describes a new integrated pressure sensor based on a Mach-Zehnder (MZ) interferometer made of SU-8 polymer. Such a device is designed with a view to working in a standard intensity modulation scheme. To this end, the device takes advantage of a differential measurement thanks to a sensing arm of the MZ structure arranged upon a thin membrane actuated by the pressure to be dealt with, while the second arm allows for a reference …
Authors
Pelletier N; Beche B; Tahani N; Camberlein L; Gaviot E; Goullet A; Landesman J-P; Zyss J
Pagination
pp. 640-643
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Publication Date
January 1, 2005
DOI
10.1109/icsens.2005.1597780
Name of conference
IEEE Sensors, 2005.