Journal article
Hybrid silicon-tellurium-dioxide DBR resonators coated in PMMA for biological sensing.
Abstract
We report on silicon waveguide distributed Bragg reflector (DBR) cavities hybridized with a tellurium dioxide (TeO2) cladding and coated in plasma functionalized poly (methyl methacrylate) (PMMA) for label free biological sensors. We describe the device structure and fabrication steps, including reactive sputtering of TeO2 and spin coating and plasma functionalization of PMMA on foundry processed Si chips, as well as the characterization of two …
Authors
Bonneville DB; Albert M; Arbi R; Munir M; Segat Frare BL; Miarabbas Kiani K; Frankis HC; Knights AP; Turak A; Sask KN
Journal
Biomedical Optics Express, Vol. 14, No. 4, pp. 1545–1561
Publisher
Optica Publishing Group
Publication Date
April 1, 2023
DOI
10.1364/boe.485824
ISSN
2156-7085