Solution Reactivity Studies for Identification of Promising New ALD and Pulsed CVD Reaction Chemistries

Solution screening reactions are described for a range of copper(II) and nickel(II) precursors in combination with the co-reagents AlMe3, ZnEt2, BEt3, Si2Me6, Sn2Me6 and B2(Pin)2 (Pin = pinacolate). These screening reactions were used to identify particularly promising precursor/co reagent combinations for copper or nickel metal deposition, and subsequent ALD/pulsed-CVD studies are described for selected cases. NMR spectroscopic studies focused …