Conference
Irradiation damage of inorganic resists on a silicon substrate
Authors
Saifullah MSM; Boothroyd CB; Botton GA; Humphreys CJ
Editors
Kirkland A; Brown PD
Pagination
pp. 531-537
Publisher
INST MATERIALS
Publication Date
January 1, 1998
ISBN-10
1-86125-051-7
Name of conference
International Centennial Symposium on the Electron
Conference place
CHURCHILL COLL, CAMBRIDGE, ENGLAND
Conference start date
September 15, 1997
Conference end date
September 17, 1997
Conference proceedings
ELECTRON