Enabling technologies for silicon-based microphotonics

In this paper we review recent work on enabling technologies for microphotonic devices, in particular those fabricated in silicon-on-insulator. A new waveguide coupler based on a graded index (GRIN) layer integrated with a microphotonic waveguide is described. Coupling efficiencies of up to 90% into a 0.5 μm Si waveguide are predicted using beam propagation method calculations. Recent theoretical and experimental work on the management of …