Conference
Electrical Trimming of the Resonance of a Silicon Micro-Ring Resonator
Abstract
Post-fabrication trimming of a silicon micro-ring resonator is demonstrated using an electrically mediated process. The resonance of a fully fabricated ring is permanently blue-shifted by 240pm after diffusion from local reservoirs of boron dopant. Thermal energy is supplied by an integrated heater.
Authors
Knights AP; Wang Z; Paez D; Dow L
Pagination
pp. 29-30
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Publication Date
August 1, 2017
DOI
10.1109/group4.2017.8082180
Name of conference
2017 IEEE 14th International Conference on Group IV Photonics (GFP)