Conference
Surface Micromachined PDMS Microchannels
Abstract
A new surface micromachining technique for Poly dimethylsiloxane (PDMS) microchannels has been developed to address the leakage problem affecting traditional PDMS microchannel process with embedded tall structures or sudden topographical transitions. Bulk micromachined PDMS cannot be conformally bonded with the surfaces having tall topological features such as thick film electrodes, porous reactor beds and other structural features. Surface …
Authors
Subramani BG; Selvaganapathy P
Pagination
pp. 587-593
Publisher
ASME International
Publication Date
January 1, 2007
DOI
10.1115/icnmm2007-30169
Name of conference
ASME 5th International Conference on Nanochannels, Microchannels, and Minichannels