Conference
Hydrogen and Nitrogen Loss during ERD Analysis of Siliicon (Oxy)nitrides
Authors
Wallace SG; Kockelkoren AC; Boudreau MG; Mascher P; Forster JS; Davies JA
Volume
248-249
Pagination
pp. 381-384
Publisher
Trans Tech Publications
Publication Date
May 29, 1997
DOI
10.4028/www.scientific.net/msf.248-249.381
Conference proceedings
Materials Science Forum
ISSN
0255-5476