Scholarly Works

Vertically-Stacked SOI Waveguides for 3-D Photonic...

Vertically-Stacked SOI Waveguides for 3-D Photonic Circuits

Abstract

We present a fabrication process for vertically-stacked SOI waveguides using spin-on-glass bonding to process individual layers. Simulations have shown that complete power transfer between $5\ \mu{\rm m}$ thick waveguides requires a 1.4 mm coupling length.

Authors

Brooks CJ; Doylend JK; Knights AP; Jessop PE

Pagination

pp. 72-74

Publisher

Institute of Electrical and Electronics Engineers (IEEE)

Publication Date

January 1, 2006

DOI

10.1109/group4.2006.1708169

Name of conference

3rd IEEE International Conference on Group IV Photonics, 2006.

Associated Experts

Andrew Knights

Professor, Faculty of Engineering

Paul Edward Jessop

Professor Emeritus, Faculty of Engineering

Labels

Fields of Research (FoR)

40 Engineering 4008 Electrical Engineering 51 Physical Sciences

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