Conference
Sub-micron optical waveguides for silicon photonics formed via the local oxidation of silicon (LOCOS)
Authors
Gardes FY; Reed GT; Knights AP; Mashanovich G; Jessop PE; Rowe L; McFaul S; Bruce D; Tarr NG
Volume
6898
Publisher
SPIE, the international society for optics and photonics
Publication Date
February 7, 2008
DOI
10.1117/12.765383
Name of conference
Silicon Photonics III
Conference proceedings
Proceedings of SPIE--the International Society for Optical Engineering
ISSN
0277-786X