Transient Viscous Phase Reaction Sintered (TVPRS) Silicon Oxynitride Ceramics

High density silicon oxynitride ceramics were fabricated by reaction-sintering a mixture of silicon nitride and silica without the use of sintering aids. Precursor silicon nitride compacts were prepared by conventional means after which they were subjected to a low temperature oxidation heat-treatment (~ 1000°C) producing a composite silicon nitride/silica compact. Oxidized compacts were then reaction-sintered in a nitrogen atmosphere at …