The local elastic and plastic strain during deformation are very complicated and different form the macroscopic strain, because most materials have inhomogeneous microstructure. In this study, local strain distribution in three dimensions has been measured using the new developed method based on image analysis in high-resolution synchrotron radiation computed tomography (SR-CT). Model and practical specimens, which made of cupper alloy and aluminum alloy, respectively, were prepared for a development procedure and application of local strain measurements. Gauging intervals of microstructural features before and after deformation gave us information of inhomogeneous local strain distribution in three dimensions. High strain was observed in a necking region appeared after tensile deformation in the model sample. A combination of non-destructive measurements by SR-CT and three-dimensional analysis revealed inhomogeneous strain distributions in practical aluminum samples.