High Precision Mechanical Components for Soft X‐ray Beamline: Engineering Goal and Testing Results

As the emittance of SR rings approaches the diffraction limit for soft x‐rays, one requires not only excellence in design and performance of the optical elements, but also precision and performance of mechanical components, such as mirror manipulators, monochromator scanners and exit slits. We will present simple but efficient solutions for the mechanical systems of this type, commonly encountered in soft x‐ray beamlines. These solutions have …