Soft X-ray spectromicroscopy beamline at the CLS: Commissioning results

The soft X-ray spectromicroscopy beamline (SM) at the Canadian Light Source (CLS) is a dedicated spectromicroscopy facility, consisting of an elliptically polarized undulator (EPU), a beamline based on a collimated PGM optimized for 100–2000eV range and two end stations: scanning transmission X-ray microscope (STXM) and roll-in X-ray photoemission electron microscope (X-PEEM, from Elmitec GmbH). The overall system has achieved its design parameters with an on-sample flux of ∼108ph/s@R=3000, 0.5A in STXM and ∼1012ph/s@R=3000, 0.5A in the PEEM, in each case at a spatial resolution exceeding 40nm. It can also provide an energy resolving power above 10,000. A careful EPU calibration procedure enables advanced polarization measurements.