Soft-x-ray projection imaging with a 1:1 ring-field optic. Academic Article uri icon

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abstract

  • A molybdenum/silicon multilayer-coated 1:1 ring-field optic with a numerical aperture of 0.0835 is used to carry out soft-x-ray projection imaging with undulator radiation at 12.9 nm. An ideal optic of this type should be able to image 0.1-µm features with a contrast exceeding 90% at this wavelength. The useful resolution of our ring-field optic is experimentally found to be approximately 0.2 µm, probably because of the presence of substrate figuring errors.

authors

  • Macdowell, AA
  • Bjorkholm, JE
  • Early, K
  • Freeman, RR
  • Himel, MD
  • Mulgrew, PP
  • Szeto, LH
  • Taylor, David
  • Tennant, DM
  • Wood Ii, OR
  • Bokor, J
  • Eichner, L
  • Jewell, TE
  • Waskiewicz, WK
  • White, DL
  • Windt, DL
  • D'Souza, RM
  • Silfvast, WT
  • Zernike, F

publication date

  • December 1, 1993