Conference
Pulsed laser deposition of Y2O3 on Si: characteristics of the interfacial layer
Authors
Craciun V; Bassim ND; Howard JM; Singh RK
Volume
4762
Pagination
pp. 93-98
Publisher
SPIE, the international society for optics and photonics
Publication Date
August 9, 2002
DOI
10.1117/12.478619
Name of conference
ALT'01 International Conference on Advanced Laser Technologies
Conference proceedings
Proceedings of SPIE--the International Society for Optical Engineering
ISSN
0277-786X