authors Chang, K-S Bassim, Nabil Schenck, PK Suehle, J Takeuchi, I Green, ML Seiler, David G Diebold, Alain C McDonald, Robert Garner, C Michael Herr, Dan Khosla, Rajinder P Secula, Erik M
presented at event CHARACTERIZATION AND METROLOGY FOR NANOELECTRONICS: 2007 International Conference on Frontiers of Characterization and Metrology Conference
keywords Materials Science Materials Science, Characterization & Testing Nanoscience & Nanotechnology Science & Technology Science & Technology - Other Topics Technology combinatorial methodology high-k dielectrics metal gate library