Conference
Low-temperature growth of epitaxial ZnO films on (001) sapphire by ultraviolet- assisted pulsed laser deposition
Abstract
Abstract. ZnO thin films have been grown on thin Si3N4 membranes and (001) sapphire substrates by an ultraviolet-assisted pulsed laser deposition (UVPLD) technique. The microstructure of the films grown on Si3N4 membranes, investigated by transmission electron microscopy, showed that crystalline and textured films can be grown by UVPLD at a substrate temperature of only 100 °C. For deposition temperatures higher than 400 °C, ZnO films grown on …
Authors
Craciun V; Perriere J; Bassim N; Singh RK; Craciun D; Spear J
Volume
69
Pagination
pp. s531-s533
Publisher
Springer Nature
Publication Date
December 1999
DOI
10.1007/s003390051463
Conference proceedings
Applied Physics A
Issue
Suppl 1
ISSN
0947-8396