Soft X-ray projection lithography Conferences uri icon

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authors

  • Jewell, TE
  • Bjorkholm, JE
  • Bokor, J
  • Eichner, L
  • Freeman, RR
  • Mansfield, WM
  • MacDowell, AA
  • Szeto, LH
  • Taylor, David
  • Tennant, DM
  • Waskiewicz, WK
  • White, DL
  • Windt, DL
  • Wood, OR

publication date

  • December 1, 1991