Measured Anomalous Dispersion, Kerr Comb, and Lasing in Hybrid TeO2-Coated Si3N4 Waveguides

We report measured anomalous dispersion, Kerr comb generation, and lasing on hybrid waveguides based on a standard wafer scale 400-nm Si3N4 coated with the TeO2 film. The use of thin Si3N4 ensures reduced stress and film crack and therefore fabrication of scalable and high yield waveguides through conventional CMOS process. On the other hand, the highly nonlinear TeO2 film is added to enhance nonlinearity and engineer waveguide dispersion while …