authors Horvath, Cameron Westwood-Bachman, Jocelyn N Setzer, Kevin McKinlay, Alexandria Naraine, Cameron M Mbonde, Hamidu M Segat Frare, Bruno L Torab Ahmadi, Pooya Mascher, Peter Bradley, Jonathan Aktary, Mirwais
keywords Engineering Engineering, Electrical & Electronic Optics Physical Sciences Science & Technology Technology fabrication photonic integrated circuits silicon nitride