Compact metamaterial grating antenna in a 300-nm silicon-on-insulator waveguide

We present a design and the experimental characterization of a compact silicon-based surface grating antenna in a 300-nm silicon-on-insulator platform. The antenna comprises metamaterial engineered L-shaped radiating nanostructures, and has a calculated efficiency of 89% and a compact footprint of $7.6 \mu \mathrm{m} \times 4.5 \mu \mathrm{m}$.