Conference
Laser-Assisted Surface Engineering of Silicon Nitride to Minimize the Surface Defects Generated During Grinding Operation: Part I
Abstract
Authors
Chinnakaruppan P; Malshe AP; Yedave SN; Park BS; Schimdt WF; Gordon MH; Batzer SA; Brown WD
Pagination
pp. 959-966
Publisher
ASME International
Publication Date
November 5, 2000
DOI
10.1115/imece2000-1903
Name of conference
Manufacturing Engineering