Enhanced Diffusion and Lattice Location of Indium and Gallium Implanted in Silicon Academic Article uri icon

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authors

  • Gamo, Kenji
  • Iwaki, Masaya
  • Masuda, Kohzoh
  • Namba, Susumu
  • Ishihara, Shinji
  • Kimura, Itsuro
  • Mitchell, Ian V
  • Ilic, Gradimir
  • Whitton, James L
  • Davies, John Arthur

publication date

  • May 1973