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Thin compliant SiGe for relaxed SiGe and strained Si growth
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Overview
Additional Document Info
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Overview
authors
Jernigan, GG
Twigg, ME
Fatemi, M
Bassim, Nabil
Thompson, PE
status
published
publication date
December 1, 2004
published in
Proceedings - Electrochemical Society
Journal
Additional Document Info
start page
857
end page
863
volume
7