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Tunable Index Back End of Line Platform for...
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Tunable Index Back End of Line Platform for Enhanced Integrated Photonics

Abstract

We demonstrate a back end of line compatible SiN based material with tunable refractive index enabling low optical loss, high non-linear Kerr response, low index photonic crystals, high efficiency couplers, low loss waveguides and temperature tolerant MUX for DWDM

Authors

Gardes FY; Lacava C; Debnath K; Bucio TD; Banakar M; Stankovic S; Alattili A; Khokhar AZ; Saito S; Petropoulos P

Pagination

pp. 85-86

Publisher

Institute of Electrical and Electronics Engineers (IEEE)

Publication Date

August 1, 2017

DOI

10.1109/group4.2017.8082208

Name of conference

2017 IEEE 14th International Conference on Group IV Photonics (GFP)

Labels

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