Conference
Tunable Index Back End of Line Platform for Enhanced Integrated Photonics
Abstract
We demonstrate a back end of line compatible SiN based material with tunable refractive index enabling low optical loss, high non-linear Kerr response, low index photonic crystals, high efficiency couplers, low loss waveguides and temperature tolerant MUX for DWDM
Authors
Gardes FY; Lacava C; Debnath K; Bucio TD; Banakar M; Stankovic S; Alattili A; Khokhar AZ; Saito S; Petropoulos P
Pagination
pp. 85-86
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Publication Date
August 1, 2017
DOI
10.1109/group4.2017.8082208
Name of conference
2017 IEEE 14th International Conference on Group IV Photonics (GFP)