authors Alonso-Ramos, C Marris-Morini, D Perez-Galacho, D Vakarin, V Vivien, L Baudot, C Benedikovic, D Boeuf, F Cassan, E Cheben, Pavel Guerber, S Le Roux, X Marcaud, G
keywords EFFICIENCY Engineering Engineering, Electrical & Electronic HIGH-DIRECTIONALITY Optics Physical Sciences Physics Physics, Applied Science & Technology Technology deep-ultraviolet technology grating couplers mass-scale production silicon nanophotonics silicon-on-insulator sub-wavelength grating metamaterials