Focused ion beam milled on-chip resonator nanostructures for applications in rare-earth-ion-doped Al2O3 active waveguides

Reflection gratings on Al2O3 channel waveguides were defined by focused ion beam milling. Fabry-Perot microcavities were fabricated and improved performance upon annealing was demonstrated, making them viable candidates as resonators for on-chip waveguide lasers. © 2009 IEEE.