The Effect of Amorphization Conditions on the Measured Activation of Source Drain Extension Implants Conference Paper uri icon

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authors

  • England, Jonathan
  • Kontos, Alexander
  • Renau, Anthony
  • Gwilliam, Russell
  • Smith, Andrew
  • Knights, Andrew
  • Jain, Amitabh
  • Seebauer, Edmund G
  • Felch, Susan B
  • Jain, Amitabh
  • Kondratenko, Yevgeniy V

publication date

  • 2008