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Construction and Performance of a Bench-Top...
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Construction and Performance of a Bench-Top Mapping Positron Alpha Tool

Abstract

A compact, user-friendly positron beam annihilation spectrometer has been designed and constructed. Design features, performance and first results are presented and discussed. Possible applications are described, including ion dosimetry and mapping, SIMOX process control, void monitoring and thin film interrogation.

Authors

Coleman PG; Burrows CP; Knights AP; Sealy BJ; Gwilliam RM

Pagination

pp. 342-345

Publisher

Institute of Electrical and Electronics Engineers (IEEE)

Publication Date

January 1, 2002

DOI

10.1109/iit.2002.1258010

Name of conference

Ion Implantation Technology. 2002. Proceedings of the 14th International Conference on
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