Conference
ECR-PECVD silicon oxynitride thin films for flat panel displays
Authors
Wood R
Publisher
SPIE, the international society for optics and photonics
Publication Date
August 29, 2017
DOI
10.1117/12.2283927
Name of conference
Opto-Canada: SPIE Regional Meeting on Optoelectronics, Photonics, and Imaging