ECR-PECVD silicon oxynitride thin films for flat panel displays Conferences

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authors

Mascher, Peter
Wood, Richard

status

published

publication date

August 29, 2017

published in

Proceedings of SPIE - The International Society for Optical Engineering Journal

presented at event

Opto-Canada: SPIE Regional Meeting on Optoelectronics, Photonics, and Imaging Conference