Conference
Erbium-doped SiOxNy films produced by ECR-PECVD
Abstract
In this paper, we report on the fabrication of Erbium doped waveguide amplifiers (EDWA's) using electron cyclotron resonance plasma enhanced chemical vapour deposition (ECR-PECVD). The salient process parameters are presented, as are the determination of the Er content through Rutherford Backscattering (RBS), and measurements of the film composition using elastic recoil detection (ERD), nuclear reaction analysis (NRA) and secondary ion mass …
Authors
Irving EA
Volume
10313
Publisher
SPIE, the international society for optics and photonics
Publication Date
August 29, 2017
DOI
10.1117/12.2283846
Name of conference
Opto-Canada: SPIE Regional Meeting on Optoelectronics, Photonics, and Imaging