Conference
Fabrication of Si/Si1-xGex waveguide WDM components
Authors
Xu D-X; Janz S; Williams RL; Allegretto E; Mailhot S; He JJ; Baribeau J-M; Lafontaine H; Stapledon J; Fraser JW
Volume
3007
Pagination
pp. 178-188
Publisher
SPIE, the international society for optics and photonics
Publication Date
April 25, 1997
DOI
10.1117/12.273852
Name of conference
Silicon-Based Monolithic and Hybrid Optoelectronic Devices
Conference proceedings
Proceedings of SPIE--the International Society for Optical Engineering
ISSN
0277-786X