Precipitation and segregation of Sb at Si-SiO2 interfaces during thermal oxidation Conferences

authors

• Williams, JS
• Petravic, M
• Li, YH
• Davies, John Arthur
• Palmer, GR

status

• published 

publication date

• February 1992

has subject area

• 0202 Atomic, Molecular, Nuclear, Particle and Plasma Physics (FoR)
• 0402 Geochemistry (FoR)
• 0915 Interdisciplinary Engineering (FoR)
• Applied Physics (Science Metrix)

published in

• Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms  Journal

presented at event

• 10TH INTERNATIONAL CONF ON ION BEAM ANALYSIS  Conference

keywords

• ANTIMONY
• ION MASS-SPECTROMETRY
• Instruments & Instrumentation
• Nuclear Science & Technology
• Physical Sciences
• Physics
• Physics, Atomic, Molecular & Chemical
• Physics, Nuclear
• SILICON
• Science & Technology
• Technology

Digital Object Identifier (DOI)

• 10.1016/0168-583x(92)95457-3

start page

• 156

end page

• 159

volume

• 64

issue

• 1-4