Fullerene ion (C60+) damage in Si at 25°C Journal Articles

authors

• Shen, Hao
• Brink, C
• Hvelplund, P
• Shiryaev, S
• Shi, PeiXiong
• Davies, John Arthur

status

• published 

publication date

• July 1997

has subject area

• 0202 Atomic, Molecular, Nuclear, Particle and Plasma Physics (FoR)
• 0402 Geochemistry (FoR)
• 0915 Interdisciplinary Engineering (FoR)
• Applied Physics (Science Metrix)

published in

• Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms  Journal

keywords

• ELASTIC-COLLISION SPIKES
• Instruments & Instrumentation
• Nuclear Science & Technology
• Physical Sciences
• Physics
• Physics, Atomic, Molecular & Chemical
• Physics, Nuclear
• Science & Technology
• Technology

Digital Object Identifier (DOI)

• 10.1016/s0168-583x(97)00286-3

start page

• 203

end page

• 206

volume

• 129

issue

• 2