Conference
Characterization and modeling of 2D-glass micro-machining by spark-assisted chemical engraving (SACE) with constant velocity
Abstract
Authors
Didar TF; Dolatabadi A; Wüthrich R
Volume
18
Publisher
IOP Publishing
Publication Date
June 1, 2008
DOI
10.1088/0960-1317/18/6/065016
Conference proceedings
Journal of Micromechanics and Microengineering
Issue
6
ISSN
0960-1317