Novel experimentally calibrated multiphase TCAD model for cobalt germanide growth Conference Paper uri icon

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abstract

  • We propose the first multiphase TCAD cobalt germanide growth model that can predict the resulting phase based on germanidation time, temperature, and ambient. The model has been calibrated to experimental results reported in the literature as well as our own data. This model can help in the design of cobalt germanide contacts with low resistance.

publication date

  • September 2017