Bonding of p-Si/n-InP wafers through surface activated bonding method at room temperature Conference Paper

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authors

Howlader, Matiar
Watanabe, T
Suga, T

status

accepted

publication date

January 1, 2001

published in

Conference Proceedings - International Conference on Indium Phosphide and Related Materials Journal

presented at event

Conference Proceedings. 2001 International Conference on Indium Phosphide and Related Materials. 13th IPRM Conference