Future nano- and micro-systems using nanobonding technologies

In this paper, some of the recent achievements in surface-activation-based nanobonding technology are described. This bonding technology allows for the combination of electronic, photonic, fluidic and mechanical functionalities into small form-factor systems for emerging applications in health diagnostics and screening, for example. These nanobonding technologies provide void-free, strong, and nanoscale bonding at room temperature or at low …