Conference
MEMS/microfluidics packaging without heating
Authors
Howlader MR
Volume
7592
Publisher
SPIE, the international society for optics and photonics
Publication Date
February 11, 2010
DOI
10.1117/12.845291
Name of conference
Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS and Nanodevices IX
Conference proceedings
Proceedings of SPIE--the International Society for Optical Engineering
ISSN
0277-786X