Long range mid-infrared propagation in Si and Ge hybrid plasmonic-photonic nano-ribbon waveguides

We have investigated a hybrid plasmonic-photonic mode in Si and Ge channel waveguides over the 1.55-8.0 μm wavelength range. A 10-nm Cu ribbon was buried midway within a Si₃N₄ "photonic slot" centered in the semiconductor strip. For the TMo mode, propagation lengths L of several millimeters are predicted for a waveguide cross-section of about 0.7λ/n x 0.7λ/n which offers optical confinement mainly within the ~λ²/400-area slot. The L increased strongly with λ. For 0.4λ/n x 0.4λ/n channels, we found multi-centimeter propagation, but there ~60% of the propagating energy had leaked out into the thick, all-around Si₃N₄ cladding.