Ultra-thin gate oxides and ultra-shallow junctions for high performance, sub-100 nm pMOSFETs Conference Paper uri icon

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authors

  • Timp, G
  • Agarwal, A
  • Bourdella, KK
  • Bower, J
  • Boone, T
  • Ghetti, A
  • Green, M
  • Gamo, J
  • Gossmann, H
  • Jacobson, D
  • Kleiman, Rafael
  • Kornblit, A
  • Klemens, F
  • Moccio, S
  • O'Malley, ML
  • Ocola, L
  • Rossm-nalia, J
  • Sapjeta, J
  • Silverman, P
  • Sorsch, T
  • Timp, W
  • Tennani, D

publication date

  • January 1, 1998